Substantially improved matching for 2D patterns
نویسنده
چکیده
Semiconductor manufacturing continues to charge down Moore’s Law of scaling. But every shrink increases the burden on lithography imaging. Traditional paths include increasing NA and reducing the illumination wavelength. However, the latest systems have maxed out NA for water-based immersion and wavelength developments are awaiting EUV systems, which are a few years away from volume production capability.
منابع مشابه
Automatic Seal Verification by Calculating Distance Between 2D and 3D Patterns
This paper describes an efficient matching approach for automatic seal verification. Most of the conventional approaches to this problem used a ref:% @ @ (& @ erence seal impression registered as a 2D image. . L , However, it was difficult to absorb various input seal f i e seal impressions. patterns by only one reference pattern. In our previous study, one of the authors has been proposed a ne...
متن کاملAn Improved Semantic Schema Matching Approach
Schema matching is a critical step in many applications, such as data warehouse loading, Online Analytical Process (OLAP), Data mining, semantic web [2] and schema integration. This task is defined for finding the semantic correspondences between elements of two schemas. Recently, schema matching has found considerable interest in both research and practice. In this paper, we present a new impr...
متن کاملAdaptive Approximate Record Matching
Typographical data entry errors and incomplete documents, produce imperfect records in real world databases. These errors generate distinct records which belong to the same entity. The aim of Approximate Record Matching is to find multiple records which belong to an entity. In this paper, an algorithm for Approximate Record Matching is proposed that can be adapted automatically with input error...
متن کاملSmall-Space 2D Compressed Dictionary Matching
The dictionary matching problem seeks all locations in a text that match any of the patterns in a dictionary. In the compressed dictionary matching problem, the input is in compressed form. In this paper we introduce the 2-dimensional compressed dictionary matching problem in Lempel-Ziv compressed images, and present an efficient solution for patterns whose rows are all periodic. Given k patter...
متن کاملImproved Critical Point Correspondence for On-line Signature Verification
an improved method to detect the critical points and obtain a matching path in 1 on-line signature verification. More critical points will be detected and the will be improved by the proposed method. We first detect critical points by ature curves for extremum points. We then introduce an improved DTW nal backward-merging DTW (BBMDTW), for the flexible matching of two 1D inally, the critical po...
متن کامل